Special Issue Ceramics Integration. Preparation of Compositionally Graded TiN-AlN and TiN-SiNx Films from Alkoxide Solutions by Liquid Injection Plasma CVD Method.
نویسندگان
چکیده
منابع مشابه
Energy Gap Reduction in Superconducting Tin Films by Quasiparticle Injection
In Sn-I-Sn-I-Pb tunneling structures the energy gap ~Sn of Sn is reduced by quasiparticle injection via single-particle tunneling between the Sn films. ~Sn as function of the quasiparticle density is probed by the Pb contact and found in agreement with the theory of OWen and Scalapino. An instability of the energy gap of Sn is observed at the critical gap reduction ratio predicted by this theor...
متن کاملPreparation and Characterization of Tin Oxide Nanowires
The aim of this research is preparation of SnO2 nanowires by means of Thermal chemical reaction vapor transport deposition (TCRVTD) method from SnO powders. The morphology, chemical composition and microstructure properties of the nanowires are characterized using field emission scanning electron microscope (FE-SEM), EDS, and XRD. The XRD diffraction patterns reveal that the SnO2 nanowires have...
متن کاملCOMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD
In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coating. The composition, crystalline structure and phase of the films were investigated by X-ray d...
متن کاملInterfacial coherency stress distribution in TiN/AlN bilayer and multilayer films studied by FEM analysis
The development of interfacial coherency stresses in TiN/AlN bilayer and multilayer films was investigated by finite element method (ABAQUS) using the four-node bilinear quadrilateral axisymmetric element CAX4R. The TiN and AlN layers are always in compression and tension at the interface, respectively, as may be expected from the fact TiN has larger lattice parameter than AlN. Both, the bi-lay...
متن کاملNew understanding of hardening mechanism of TiN/SiNx-based nanocomposite films
In order to clarify the controversies of hardening mechanism for TiN/SiNx-based nanocomposite films, the microstructure and hardness for TiN/SiNx and TiAlN/SiNx nanocomposite films with different Si content were studied. With the increase of Si content, the crystallization degree for two series of films firstly increases and then decreases. The microstructural observations suggest that when SiN...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 2002
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.110.444